
| Chemical & Physical Properties | |
|---|---|
| CAS Number | 75-79-6 |
| Catalog No. | 2A-9017114 |
| Synonyms | trichloro-methylsilane; trichloro-methyl-silane; Dow Corning product Z-1211; InChI=1/CH3Cl3Si/c1-5(2,3)4/h1H; Methylsilyl trichloride |
| Molecular Formula | CH3SiCl3 |
| Molecular Weight | 149.48 |
| Purity | 99 |
| Boiling Point | 66 °C (lit.) |
| Appearance | liquid |
| EINECS | 200-902-6 |
| PubChem ID | 24897271 |
| MDL Number | MFCD00000481 |
| SMILES | C[Si](Cl)(Cl)Cl |
| InChI | 1S/CH3Cl3Si/c1-5(2,3)4/h1H3 |
| InChI Key | JLUFWMXJHAVVNN-UHFFFAOYSA-N |
| Beilstein/REAXYS | 1361381 |
| NACRES Code | NA.22 |
| UNSPSC | 12352300 |
| MSDS | msds/17114_1_75_79_6.pdf |
| Related Products in Semiconductor Chemical Intermediates | ||
|---|---|---|
| Phosphorus trichloride | 7719-12-2 | 2A-9015304 |
| tert-Butyldimethylchlorosilane | 18162-48-6 | 2A-9015884 |
| Trichlorosilane | 10025-78-2 | 2A-0201472 |
| Trimethylgallium | 1445-79-0 | 2A-9016037 |
| Trimethylindium | 3385-78-2 | 2A-9016038 |
| Phenyltrichlorosilane | 98-13-5 | 2A-9018049 |
| Boron trifluoride etherate | 109-63-7 | 2A-9018685 |
| Ethyltrichlorosilane | 115-21-9 | 2A-9018921 |
| Boron trifluoride dimethyl etherate | 353-42-4 | 2A-9021462 |
| Boron trifluoride-acetic acid complex | 373-61-5 | 2A-9021590 |
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